UCLA MICROLAB

Equipment/Instruments Wish List

The UCLA Microlab is currently looking for the following equipment and instruments for its Microfabrication Laboratory Courses in CMOS and MEMS technologies. We wish the microelectronic and MEMS industrial company would support our mission through generous donation and educational discount.

  1. Rapid Thermal Processor (Modular Process Technology Corp)
  2. RIE Silicon Etcher (Lam Research Corp)
  3. RIE Al Metal Etcher (Lam Research Corp)
  4. RIE Oxide/Nitride Etcher (Lam Research Corp)
  5. High Vaccum PECVD
  6. Thin Film Stress Measurement (Tencor)
  7. E-beam evaporator
  8. DC&RF Magnetron Sputterer
  9. Nitride CVD furnace (Tystar)
  10. Oxidation Furnaces (Tystar)
  11. Poly Deposition Furnace (Tystar)
  12. 2 Single wafer spin dryers (Headway)
  13. Programmable PR Spinners (Headway)
  14. Precision LCR Meters (Agilent Technology)
  15. Nanoimprinter
  16. Software for MEMS Process Simulations
  17. Probe Station Optical Microscopes and Lenses

 

If your company wishes to donate equipment/instruments to the UCLA Microlab, please send an email to Dr. Grant Pan at gzpan@ee.ucla.edu