Table of Contents
Equipment Manuals
Photolithography
Etching
Oxidation/Anneal
Chemical Vapor Deposition
Metal Deposition
Sintering
Characterization
Equipment Manuals
Photolithography
Headway Spin Coater
Quintel Mask Alginer
Karl Suss 1
Karl Suss 2
Etching
Tegal Oxygen Asher
Plasmatherm Deep Reactive Ion Etcher (DRIE)
CHA Evaporator
Oxford Plasmalab Plasma Etcher
Technics Flourine Reactive Ion Etcher
Oxidation/Anneal
Oxidation Furnace
Chemical Vapor Deposition
Polysilicon LPCVD Furnace
Low Temperature Oxide LPCVD Furnace
Plasma Enhanced Chemical Vapor Deposition
Metal Deposition
CVC Sputtering System
Sintering
Sintering/Annealing Furnace
Characterization
Microscopes
Nansopec Film Thickness Measurement System
Alphastep
Dektak Profiler
Probe Stations
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